EEE 549 Nanoscale Fabrication Technologies for Semiconductors

Nanoscale fabrication methods used for semiconductor devices and VLSI technology. Revief of Semiconductor Technology, Review of Semiconductor Device Physics, Outline of a nanoscale CMOS fabrication process, Crystal Growth, Semiconductor Manufacturing, Cleanrooms and wafer cleaning, Nanolithography, Oxidation, Diffusion, Ion Implantation, Thin film deposition, Etching, and Backend technology. Credit units: 3 ECTS Credit units: 7.5.

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