ME 580 Introduction to MEMS and Micro Systems
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Analysis of microelectromechanical systems (MEMS), design of microsystems, components of MEMS devices such as beams, folded suspensions and their analysis ?amp; design metrics, beams as micromechanical springs, clean room fabrication techniques, MEMS sensors, accelerometers, gyroscopes, resonant mass/force sensors, MEMS actuation methods, measurement and noise analysis of MEMS devices.
Credit units: 3 ECTS Credit units: 5.
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