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Bilkent University

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Undergraduate and Graduate Programs 2023-2024

ME 580 Introduction to MEMS and Micro Systems

Analysis of microelectromechanical systems (MEMS), design of microsystems, components of MEMS devices such as beams, folded suspensions and their analysis ?amp; design metrics, beams as micromechanical springs, clean room fabrication techniques, MEMS sensors, accelerometers, gyroscopes, resonant mass/force sensors, MEMS actuation methods, measurement and noise analysis of MEMS devices. Credit units: 3 ECTS Credit units: 5.

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