Bilkent University Logo

Bilkent University

Online Academic Catalog

Undergraduate and Graduate Programs 2020-2021

EEE 549 Nanoscale Fabrication Technologies for Semiconductors

Nanoscale fabrication methods used for semiconductor devices and VLSI technology. Review of Semiconductor Technology, Review of Semiconductor Device Physics, Outline of a nanoscale CMOS fabrication process, Crystal Growth, Semiconductor Manufacturing, Cleanrooms and wafer cleaning, Nanolithography, Oxidation, Diffusion, Ion Implantation, Thin film deposition, Etching, and Backend technology. Credit units: 3 ECTS Credit units: 5.

Bilkent University Main Page

Last regenerated automatically on September 20, 2021 by OAC - Online Academic Catalog Software