EEE 549 Nanoscale Fabrication Technologies for Semiconductors
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Nanoscale fabrication methods used for semiconductor devices and VLSI technology. Review of Semiconductor Technology, Review of Semiconductor Device Physics, Outline of a nanoscale CMOS fabrication process, Crystal Growth, Semiconductor Manufacturing, Cleanrooms and wafer cleaning, Nanolithography, Oxidation, Diffusion, Ion Implantation, Thin film deposition, Etching, and Backend technology.
Credit units: 3 ECTS Credit units: 5.
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