MSN 551 Introduction to Micro and Nanofabrication
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Introduction to conventional methods in macro and nanofabrication. Basics of film deposition techniques, optical and electron beam lithography, wet and dry etching methods, implantation and diffusion. Applications of microfabrication to CMOS fabrication and micro and nanoelectromechanical systems. Some non-conventional methods of micro and nanostructure fabrication.
Credit units: 3 ECTS Credit units: 5.
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